ETCH PITS AND DISLOCATIONS OF GA1-XALXAS LIQUID-PHASE EPITAXIAL LAYERS

被引:12
作者
KOMIYA, S [1 ]
AKITA, K [1 ]
NISHITANI, Y [1 ]
ISOZUMI, S [1 ]
KOTANI, T [1 ]
机构
[1] FUJITSU LABS LTD,NAKAHARA KU,KAWASAKI,JAPAN
关键词
D O I
10.1063/1.323096
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:3367 / 3369
页数:3
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