KINETICS OF INTERFACIAL REACTION IN BIMETALLIC CU-SN THIN-FILMS

[1] ANTHONY TR, 1968, P INT C VACANCIES IN

[2] FORMATION OF NI AND PT SILICIDE 1ST PHASE - DOMINANT ROLE OF REACTION-KINETICS [J]. APPLIED PHYSICS LETTERS, 1978, 33 (02) : 187 - 190

[3] IMPLANTED NOBLE-GAS ATOMS AS DIFFUSION MARKERS IN SILICIDE FORMATION [J]. THIN SOLID FILMS, 1975, 25 (02) : 393 - 402

[4] Chu WK., 1978, BACKSCATTERING SPECT

[5] INTERSTITIAL DIFFUSION OF COPPER IN TIN [J]. JOURNAL OF APPLIED PHYSICS, 1967, 38 (08) : 3408 - &

[6] HANSEN M, 1958, CONSTITUTION BINARY, P610

[7] GROWTH AND TRANSFORMATION OF PD2SI ON (111), (110) AND (100) SI [J]. THIN SOLID FILMS, 1973, 18 (02) : 343 - 363

[8] Nowick A. S., 1968, Comments on Solid State Physics, V1, P140

[9] REVIEW OF BINARY ALLOY FORMATION BY THIN-FILM INTERACTIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05): : 1112 - 1119

[10] Tu K. N., 1973, Acta Metallurgica, V21, P347, DOI 10.1016/0001-6160(73)90190-9

[1] ANTHONY TR, 1968, P INT C VACANCIES IN

[2] FORMATION OF NI AND PT SILICIDE 1ST PHASE - DOMINANT ROLE OF REACTION-KINETICS [J]. APPLIED PHYSICS LETTERS, 1978, 33 (02) : 187 - 190

[3] IMPLANTED NOBLE-GAS ATOMS AS DIFFUSION MARKERS IN SILICIDE FORMATION [J]. THIN SOLID FILMS, 1975, 25 (02) : 393 - 402

[4] Chu WK., 1978, BACKSCATTERING SPECT

[5] INTERSTITIAL DIFFUSION OF COPPER IN TIN [J]. JOURNAL OF APPLIED PHYSICS, 1967, 38 (08) : 3408 - &

[6] HANSEN M, 1958, CONSTITUTION BINARY, P610

[7] GROWTH AND TRANSFORMATION OF PD2SI ON (111), (110) AND (100) SI [J]. THIN SOLID FILMS, 1973, 18 (02) : 343 - 363

[8] Nowick A. S., 1968, Comments on Solid State Physics, V1, P140

[9] REVIEW OF BINARY ALLOY FORMATION BY THIN-FILM INTERACTIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05): : 1112 - 1119

[10] Tu K. N., 1973, Acta Metallurgica, V21, P347, DOI 10.1016/0001-6160(73)90190-9