FORMATION OF NI AND PT SILICIDE 1ST PHASE - DOMINANT ROLE OF REACTION-KINETICS

被引：53

作者：

CANALI, C

CATELLANI, F

OTTAVIANI, G

PRUDENZIATI, M

机构：

来源：

APPLIED PHYSICS LETTERS | 1978年 / 33卷 / 02期

关键词：

D O I：

10.1063/1.90269

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：187 / 190

页数：4

共 17 条

[1] ANALYTICAL STUDY OF PLATINUM SILICIDE FORMATION [J].

BINDELL, JB ;

COLBY, JW ;

WONSIDLER, DR ;

POATE, JM ;

CONLEY, DK ;

TISONE, TC .

THIN SOLID FILMS, 1976, 37 (03) :441-452

[2] PT2SI AND PTSI FORMATION WITH HIGH-PURITY PT THIN-FILMS [J].

CANALI, C ;

CATELLANI, C ;

PRUDENZIATI, M ;

WADLIN, WH ;

EVANS, CA .

APPLIED PHYSICS LETTERS, 1977, 31 (01) :43-45

[3] IDENTIFICATION OF DOMINANT DIFFUSING SPECIES IN SILICIDE FORMATION [J].

CHU, WK ;

KRAUTLE, H ;

MAYER, JW ;

MULLER, H ;

NICOLET, MA ;

TU, KN .

APPLIED PHYSICS LETTERS, 1974, 25 (08) :454-457

[4] SILICIDE FORMATION IN NI-SI SCHOTTKY-BARRIER DIODES [J].

COE, DJ ;

RHODERICK, EH .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1976, 9 (06) :965-972

[5] LOW-TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM [J].

HIRAKI, A ;

NICOLET, MA ;

MAYER, JW .

APPLIED PHYSICS LETTERS, 1971, 18 (05) :178-&

[6] EVALUATION OF GLANCING ANGLE X-RAY-DIFFRACTION AND MEV HE-4 BACKSCATTERING ANALYSES OF SILICIDE FORMATION [J].

LAU, SS ;

CHU, WK ;

MAYER, JW ;

TU, KN .

THIN SOLID FILMS, 1974, 23 (02) :205-213

[7]

LYNCH CT, 1974, HDB MATERIALS

[8] ANALYSIS OF THIN-FILM STRUCTURES WITH NUCLEAR BACKSCATTERING AND X-RAY-DIFFRACTION [J].

MAYER, JW ;

TU, KN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :86-93

[9] SOLID-SOLID REACTIONS IN PT-SI SYSTEMS [J].

MUTA, H ;

SHINODA, D .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (06) :2913-+

[10] INFLUENCE OF NATURE OF SI SUBSTRATE ON NICKEL SILICIDE FORMED FROM THIN NI FILMS [J].

OLOWOLAFE, JO ;

NICOLET, MA ;

MAYER, JW .

THIN SOLID FILMS, 1976, 38 (02) :143-150

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