THERMOMECHANICAL PROPERTIES OF AMORPHOUS-SILICON AND NONSTOICHIOMETRIC SILICON-OXIDE FILMS

被引：37

作者：

JANSEN, F

MACHONKIN, MA

PALMIERI, N

KUHMAN, D

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 12期

关键词：

D O I：

10.1063/1.339026

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4732 / 4736

页数：5

共 20 条

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