USE OF ION IMPLANTATION TECHNIQUES TO FABRICATE SEMICONDUCTOR NUCLEAR PARTICLE DETECTORS

被引：9

作者：

MAYER, JW

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1968年 / 63卷 / 02期

关键词：

D O I：

10.1016/0029-554X(68)90319-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：141 / &

共 65 条

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