USE OF ION IMPLANTATION TECHNIQUES TO FABRICATE SEMICONDUCTOR NUCLEAR PARTICLE DETECTORS

被引:9
作者
MAYER, JW
机构
来源
NUCLEAR INSTRUMENTS & METHODS | 1968年 / 63卷 / 02期
关键词
D O I
10.1016/0029-554X(68)90319-4
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
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页码:141 / &
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