LOW-TEMPERATURE DIAMOND GROWTH IN A MICROWAVE-DISCHARGE

被引：25

作者：

HSU, WL ^{[1
]}

TUNG, DM ^{[1
]}

FUCHS, EA ^{[1
]}

MCCARTY, KF ^{[1
]}

JOSHI, A ^{[1
]}

NIMMAGADDA, R ^{[1
]}

机构：

[1] LOCKHEED RES CTR,PALO ALTO,CA 94304

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 26期

关键词：

D O I：

10.1063/1.101939

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2739 / 2741

页数：3

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共 13 条

[1] LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES
ANGUS, JC
HAYMAN, CC
[J]. SCIENCE, 1988, 241 (4868) : 913 - 921
[2] HIROSE Y, 1989, IN PRESS 1ST P INT S
[3] CHEMICAL EROSION OF GRAPHITE BY HYDROGEN IMPACT - A SUMMARY OF THE DATABASE RELEVANT TO DIAMOND FILM GROWTH
HSU, WL
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 1803 - 1811
[4] HSU WL, 1987, MATER RES SOC S P, V98, P155
[5] EFFECTS OF OXYGEN ON CVD DIAMOND SYNTHESIS
KAWATO, T
KONDO, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (09): : 1429 - 1432
[6] CHARACTERIZATION OF DIAMOND FILMS BY RAMAN-SPECTROSCOPY
KNIGHT, DS
WHITE, WB
[J]. JOURNAL OF MATERIALS RESEARCH, 1989, 4 (02) : 385 - 393
[7] GROWTH OF DIAMOND PARTICLES FROM METHANE-HYDROGEN GAS
MATSUMOTO, S
SATO, Y
TSUTSUMI, M
SETAKA, N
[J]. JOURNAL OF MATERIALS SCIENCE, 1982, 17 (11) : 3106 - 3112
[8] SYNTHESIS OF DIAMOND FILMS IN A RF INDUCTION THERMAL PLASMA
MATSUMOTO, S
HINO, M
KOBAYASHI, T
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (10) : 737 - 739
[9] THE GROWTH OF DIAMOND IN MICROWAVE PLASMA UNDER LOW-PRESSURE
MITSUDA, Y
KOJIMA, Y
YOSHIDA, T
AKASHI, K
[J]. JOURNAL OF MATERIALS SCIENCE, 1987, 22 (05) : 1557 - 1562
[10] SYNTHESIS OF DIAMOND BY DECOMPOSITION OF METHANE IN MICROWAVE PLASMA
SAITO, Y
MATSUDA, S
NOGITA, S
[J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1986, 5 (05) : 565 - 568