SILICON-OXIDE FILM FORMATION BY FOCUSED ION-BEAM (FIB)-ASSISTED DEPOSITION

[1] ECONOMOU WP, 1987, P SOC PHOTO-OPT INS, V773, P201

[2] ION-BEAM ASSISTED DEPOSITION OF METAL ORGANIC FILMS USING FOCUSED ION-BEAMS [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05): : L293 - L295

[3] Harriott L. R., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V773, P190, DOI 10.1117/12.940370

[4] FOCUSED ION-BEAM INDUCED DEPOSITION OF OPAQUE CARBON-FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03): : 1035 - 1038

[5] KAUFMAN HC, 1986, SPIE, V632, P60

[6] FOCUSED-ION-BEAM FUSE CUTTING FOR REDUNDANCY TECHNOLOGY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (07) : 899 - 903

[7] FOCUSED ION-BEAM INDUCED DEPOSITION OF GOLD [J]. APPLIED PHYSICS LETTERS, 1986, 49 (23) : 1584 - 1586

[8] EVALUATIONS OF PLASMA SILICON-OXIDE FILM (P-SIO) BY INFRARED-ABSORPTION [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (02) : 443 - 445

[9] Ward B. W., 1988, Proceedings of the SPIE - The International Society for Optical Engineering, V923, P92, DOI 10.1117/12.945636

[10] YAMAMOTO M, 1986, SPIE, V632, P97

[1] ECONOMOU WP, 1987, P SOC PHOTO-OPT INS, V773, P201

[2] ION-BEAM ASSISTED DEPOSITION OF METAL ORGANIC FILMS USING FOCUSED ION-BEAMS [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05): : L293 - L295

[3] Harriott L. R., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V773, P190, DOI 10.1117/12.940370

[4] FOCUSED ION-BEAM INDUCED DEPOSITION OF OPAQUE CARBON-FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03): : 1035 - 1038

[5] KAUFMAN HC, 1986, SPIE, V632, P60

[6] FOCUSED-ION-BEAM FUSE CUTTING FOR REDUNDANCY TECHNOLOGY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (07) : 899 - 903

[7] FOCUSED ION-BEAM INDUCED DEPOSITION OF GOLD [J]. APPLIED PHYSICS LETTERS, 1986, 49 (23) : 1584 - 1586

[8] EVALUATIONS OF PLASMA SILICON-OXIDE FILM (P-SIO) BY INFRARED-ABSORPTION [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (02) : 443 - 445

[9] Ward B. W., 1988, Proceedings of the SPIE - The International Society for Optical Engineering, V923, P92, DOI 10.1117/12.945636

[10] YAMAMOTO M, 1986, SPIE, V632, P97