CONTACT ELECTRIFICATION ON THIN SILICON-OXIDE IN VACUUM

被引：11

作者：

TSUYUGUCHI, T ^{[1
]}

UCHIHASHI, T ^{[1
]}

OKUSAKO, T ^{[1
]}

SUGAWARA, Y ^{[1
]}

MORITA, S ^{[1
]}

YAMANISHI, Y ^{[1
]}

OASA, T ^{[1
]}

机构：

[1] SUMITOMO MET IND LTD, ADV TECHNOL RES LABS, AMAGASAKI, HYOGO 660, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1994年 / 33卷 / 7B期

关键词：

CONTACT ELECTRIFICATION; ATOMIC FORCE MICROSCOPE; SILICON OXIDE; ELECTROSTATIC FORCE; ADSORBED WATER LAYER; AIR; VACUUM; SURFACE DIFFUSION; BULK DIFFUSION;

D O I：

10.1143/JJAP.33.L1046

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We investigated the microscopic dissipation of contact electrified charges on a thin SiO2 film in vacuum where a thin layer of water may be adsorbed on the surface using an atomic force microscope (AFM). Charges with narrower spatial distributions were deposited in smaller amounts in vacuum than in air. Moreover, the deposited charge areas in vacuum showed no broadening with time after contact electrification. These demonstrate that the rapid surface diffusion of the charges in air may be caused by a water layer adsorbed on the insulator surfaces.

引用

页码：L1046 / L1048

页数：3

共 16 条

[1] ATOMIC FORCE MICROSCOPY USING OPTICAL INTERFEROMETRY [J].

ERLANDSSON, R ;

MCCLELLAND, GM ;

MATE, CM ;

CHIANG, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (02) :266-270

[2] DISSIPATION OF CONTACT-ELECTRIFIED CHARGE ON THIN SI-OXIDE STUDIED BY ATOMIC-FORCE MICROSCOPY [J].

MORITA, S ;

FUKANO, Y ;

UCHIHASHI, T ;

SUGAWARA, Y ;

YAMANISHI, Y ;

OASA, T .

APPLIED SURFACE SCIENCE, 1994, 75 :151-156

[3] STABLE-UNSTABLE PHASE-TRANSITION OF DENSELY CONTRACT-ELECTRIFIED ELECTRONS ON THIN SILICON-OXIDE [J].

MORITA, S ;

SUGAWARA, Y ;

FUKANO, Y ;

UCHIHASHI, T ;

OKUSAKO, T ;

CHAYAHARA, A ;

YAMANISHI, Y ;

OASA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1993, 32 (12B) :L1852-L1854

[4] ATOMIC-FORCE MICROSCOPE COMBINED WITH SCANNING TUNNELING MICROSCOPE [AFM/STM] [J].

MORITA, S ;

SUGAWARA, Y ;

FUKANO, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (6B) :2983-2988

[5] REPRODUCIBLE AND CONTROLLABLE CONTACT ELECTRIFICATION ON A THIN INSULATOR [J].

MORITA, S ;

FUKANO, Y ;

UCHIHASHI, T ;

OKUSAKO, T ;

SUGAWARA, Y ;

YAMANISHI, Y ;

OASA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1993, 32 (11B) :L1701-L1703

[6] OBSERVATION OF ATOMIC DEFECTS ON LIF(100) SURFACE WITH ULTRAHIGH-VACUUM ATOMIC-FORCE MICROSCOPE (UHV AFM) [J].

OHTA, M ;

KONISHI, T ;

SUGAWARA, Y ;

MORITA, S ;

SUZUKI, M ;

ENOMOTO, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1993, 32 (6B) :2980-2982

[7] ELECTROSTATIC WRITING AND IMAGING USING A FORCE MICROSCOPE [J].

SAURENBACH, F ;

TERRIS, BD .

IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS, 1992, 28 (01) :256-260

[8]

Schonenberger C., 1991, Modern Physics Letters B, V5, P871, DOI 10.1142/S0217984991001076

[9] OBSERVATION OF SINGLE CHARGE-CARRIERS BY FORCE MICROSCOPY [J].

SCHONENBERGER, C ;

ALVARADO, SF .

PHYSICAL REVIEW LETTERS, 1990, 65 (25) :3162-3164

[10] DEPOSITION AND IMAGING OF LOCALIZED CHARGE ON INSULATOR SURFACES USING A FORCE MICROSCOPE [J].

STERN, JE ;

TERRIS, BD ;

MAMIN, HJ ;

RUGAR, D .

APPLIED PHYSICS LETTERS, 1988, 53 (26) :2717-2719

← 1 2 →