PROXIMITY GETTERING OF AU TO ION-BEAM-INDUCED DEFECTS IN SILICON

被引：30

作者：

WONGLEUNG, J ^{[1
]}

WILLIAMS, JS ^{[1
]}

ELLIMAN, RG ^{[1
]}

NYGREN, E ^{[1
]}

EAGLESHAM, DJ ^{[1
]}

JACOBSON, DC ^{[1
]}

POATE, JM ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1995年 / 96卷 / 1-2期

关键词：

D O I：

10.1016/0168-583X(94)00494-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Rutherford backscattering and transmission electron microscopy have been used to analyse Au implanted Si (100) samples containing various types of implantation-induced disorder both before and after annealing. Gettering and precipitation phenomena are observed indicating complex diffusion behaviour and Au-defect interactions. For samples containing a subsurface band of internal cavities, almost 100% of implanted Au is gettered to such cavities when annealed at 850 degrees C for 1 h.

引用

页码：253 / 256

页数：4

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