DIFFUSION AND PRECIPITATION IN AMORPHOUS SI

被引:46
作者
ELLIMAN, RG [1 ]
GIBSON, JM [1 ]
JACOBSON, DC [1 ]
POATE, JM [1 ]
WILLIAMS, JS [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1063/1.95563
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:478 / 480
页数:3
相关论文
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