LASER PATTERNING OF METAL-OXIDE SUPERCONDUCTOR FILMS BY REACTIVE SOLID-STATE TRANSFORMATION

被引：8

作者：

ROTHSCHILD, M

SEDLACEK, JHC

BLACK, JG

EHRLICH, DJ

机构：

[1] MIT, Lexington, MA, USA, MIT, Lexington, MA, USA

来源：

IEEE ELECTRON DEVICE LETTERS | 1988年 / 9卷 / 02期

关键词：

Manuwript received October 20. 1987. This work was sponsored by the Department of the Air Force. in part under a hpecific program supported by the Air Force Office of Scientific Research. and by the Defense Advanced Ke\earch Projects Agency. The authors are with Lincoln Laboratory. Massichusetts Institute of Technology. Lexington. MA 02 I73 IEEE Log Number 87191 1 I;

D O I：

10.1109/55.2043

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：68 / 70

页数：3

共 11 条

[1] ANNEALING TREATMENT EFFECTS ON STRUCTURE AND SUPERCONDUCTIVITY IN Y1BA2CU3O9-X
BEYERS, R
LIM, G
ENGLER, EM
LEE, VY
RAMIREZ, ML
SAVOY, RJ
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SHAW, TM
LAPLACA, S
BOEHME, R
TSUEI, CC
PARK, SI
SHAFER, MW
GALLAGHER, WJ
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (08) : 614 - 616
[2] CRYSTALLOGRAPHY AND MICROSTRUCTURE OF Y1BA2CU3O9-X, A PEROVSKITE-BASED SUPERCONDUCTING OXIDE
BEYERS, R
LIM, G
ENGLER, EM
SAVOY, RJ
SHAW, TM
DINGER, TR
GALLAGHER, WJ
SANDSTROM, RL
[J]. APPLIED PHYSICS LETTERS, 1987, 50 (26) : 1918 - 1920
[3] NEW PHASES IN THE SUPERCONDUCTING Y-BA-CU-O SYSTEM
EAGLESHAM, DJ
HUMPHREYS, CJ
ALFORD, NM
CLEGG, WJ
HARMER, MA
BIRCHALL, JD
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (06) : 457 - 459
[4] INFLUENCE OF ASH3, PH3, AND B2H6 ON GROWTH-RATE AND RESISTIVITY OF POLYCRYSTALLINE SILICON FILMS DEPOSITED FROM A SIH4-H2 MIXTURE
EVERSTEY.FC
PUT, BH
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (01) : 106 - 110
[5] EXCIMER-LASER-INDUCED ETCHING OF CERAMIC PBTI1-XZRXO3
EYETT, M
BAUERLE, D
WERSING, W
THOMANN, H
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (04) : 1511 - 1514
[6] CRYSTALLOGRAPHIC DESCRIPTION OF PHASES IN THE Y-BA-CU-O SUPERCONDUCTOR
HAZEN, RM
FINGER, LW
ANGEL, RJ
PREWITT, CT
ROSS, NL
MAO, HK
HADIDIACOS, CG
HOR, PH
MENG, RL
CHU, CW
[J]. PHYSICAL REVIEW B, 1987, 35 (13): : 7238 - 7241
[7] PULSED LASER ETCHING OF HIGH-TC SUPERCONDUCTING FILMS
INAM, A
WU, XD
VENKATESAN, T
OGALE, SB
CHANG, CC
DIJKKAMP, D
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (14) : 1112 - 1114
[8] TEMPERATURE RISE INDUCED BY A LASER-BEAM
LAX, M
[J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (09) : 3919 - 3924
[9] ROTHSCHILD M, 1988, IN PRESS APPL P 0201
[10] PREPARATION OF SUPERCONDUCTING YBA2CU3OX THIN-FILMS BY OXYGEN ANNEALING OF MULTILAYER METAL-FILMS
TSAUR, BY
DILORIO, MS
STRAUSS, AJ
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (11) : 858 - 860

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