共 26 条
[1]
ASHBY CIH, 1984, APPL PHYS LETT, V45, P892, DOI 10.1063/1.95404
[3]
LASER-INDUCED ETCHING OF SI WITH CHLORINE
[J].
JOURNAL OF APPLIED PHYSICS,
1986, 60 (07)
:2321-2326
[4]
THE THERMAL AND ION-ASSISTED REACTIONS OF GAAS(100) WITH MOLECULAR CHLORINE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1986, 4 (04)
:794-805
[9]
BREWER PD, 1985, APPL PHYS LETT, V47, P301