DESIGN AND USE OF A VACUUM-SYSTEM FOR HIGH-RATE REACTIVE SPUTTERING OF TIO2/TIN/TIO2 SOLAR CONTROL FILMS

被引：26

作者：

SPENCER, AG ^{[1
]}

GEORGSON, M ^{[1
]}

BISHOP, CA ^{[1
]}

STENBERG, E ^{[1
]}

HOWSON, RP ^{[1
]}

机构：

[1] UNIV UPPSALA,INST TECHNOL,S-75121 UPPSALA,SWEDEN

来源：

SOLAR ENERGY MATERIALS | 1988年 / 18卷 / 1-2期

关键词：

Films--Optical Properties - Nitrides--Optical Properties - Solar Radiation--Collectors - Sputtering - Titanium Oxides;

D O I：

10.1016/0165-1633(88)90049-4

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

The compound metal TiN shows solar selective properties both in bulk and thin film form. It has previously been suggested that thin films of TiN, when anti-reflected by TiO2 layers, would form a hard and durable solar selective coating. We have made such multi-layer films and report on their properties. This paper also describes a new sputter coater and gives details of its design and performance. Features of this coater include a high pumping rate to give stable reactive sputtering and a load lock system to provide a high productivity of samples.

引用

页码：87 / 95

页数：9

共 11 条

[1]

CARPENTER LG, 1983, VACUUM TECHNOLOGY

[2]

FIASCHI K, 1987, OPTICAL CHARACTERIZA

[3]

Heavens O.S., 1955, OPTICAL PROPERTIES T

[4] REACTIVE ION PLATING OF TIO2 [J].