CARBON-MONOXIDE PROMOTED CHEMICAL VAPOR-DEPOSITION OF COPPER

被引：13

作者：

KUMAR, R ^{[1
]}

MAVERICK, AW ^{[1
]}

机构：

[1] LOUISIANA STATE UNIV,DEPT CHEM,BATON ROUGE,LA 70803

来源：

CHEMISTRY OF MATERIALS | 1993年 / 5卷 / 03期

关键词：

D O I：

10.1021/cm00027a004

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Chemical vapor deposition of Cu, using (hfac)-Cu(I)(COD) as precursor and CO or CO/H-2 (1:1 v/v, 1 atm) as carrier gas, occurs with source at 30-35-degrees-C and substrate at 170-175-degrees-C. These temperatures are ca. 30-degrees-C lower than required with H-2 carrier. The enhanced deposition is attributed to the intermediate formation of (hfac)Cu(I)(CO). CuCVD also occurs with (hfac)Cu(I)(CO), dissolved in THF, as precursor.

引用

页码：251 / 253

页数：3

共 26 条

[1] BINUCLEAR COMPLEXES .3. SYNTHESIS AND REACTIVITY OF A FAMILY OF COPPER MONOOXYGENASE MODEL SYSTEMS [J].

CASELLA, L ;

GULLOTTI, M ;

PALLANZA, G ;

RIGONI, L .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1988, 110 (13) :4221-4227

[2] THE CHEMISTRY OF BETA-DIKETONATE COPPER(I) COMPOUNDS .3. THE SYNTHESIS OF (BETA-DIKETONATE) CU(1,5-COD) COMPOUNDS, THE SOLID-STATE STRUCTURE AND DISPROPORTIONATION OF HEXAFLUOROACETYLACETONATO (1,5-CYCLOOCTADIENE)COPPER(I), (HFAC)CU(1,5-COD) [J].

CHI, KM ;

SHIN, HK ;

HAMPDENSMITH, MJ ;

DUESLER, EN ;

KODAS, TT .

POLYHEDRON, 1991, 10 (19) :2293-2299

[3] SURFACE-ANALYSIS STUDIES OF COPPER CHEMICAL VAPOR-DEPOSITION FROM 1,5-CYCLOOCTADIENE-COPPER(I)-HEXAFLUOROACETYLACETONATE [J].

COHEN, SL ;

LIEHR, M ;

KASI, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04) :863-868

[4] SELECTIVITY IN COPPER CHEMICAL VAPOR-DEPOSITION [J].

COHEN, SL ;

LIEHR, M ;

KASI, S .

APPLIED PHYSICS LETTERS, 1992, 60 (13) :1585-1587

[5]

COHEN SL, 1992, APPL PHYS LETT, V50, P60

[6] ALKENE AND CARBON-MONOXIDE DERIVATIVES OF COPPER(I) AND SILVER(I) BETA-DIKETONATES [J].

DOYLE, G ;

ERIKSEN, KA ;

VANENGEN, D .

ORGANOMETALLICS, 1985, 4 (05) :830-835

[7] PREPARATION OF COPPER(I) CARBONYL-COMPLEXES DERIVED FROM SULFONIC-ACIDS - CRYSTAL-STRUCTURE OF CU(CO)C2H5SO3 [J].

DOYLE, G ;

ERIKSEN, KA ;

VANENGEN, D .

INORGANIC CHEMISTRY, 1983, 22 (20) :2892-2895

[8]

Dubois L. H., 1992, Advanced Metallization for ULSI Applications (Formerly Workshop on Tungsten and Other Advanced Metals for ULSI Applications) Proceedings of the Conference, P375

[9] SELECTIVITY AND COPPER CHEMICAL VAPOR-DEPOSITION [J].

DUBOIS, LH ;

ZEGARSKI, BR .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (11) :3295-3299

[10] Laser-Induced Deposition of Copper from (Triethylphosphine)cyclopentadienyl-copper(I) [J].

Dupuy, C. G. ;

Beach, D. B. ;

Hurst, J. E., Jr. ;

Jasinski, J. M. .

CHEMISTRY OF MATERIALS, 1989, 1 (01) :16-18

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