ARC LAMP ZONE-MELTING AND RECRYSTALLIZATION OF SI FILMS ON OXIDIZED SILICON SUBSTRATES

被引：37

作者：

STULTZ, TJ ^{[1
]}

GIBBONS, JF ^{[1
]}

机构：

[1] LOCKHEED PALO ALTO RES LABS,PALO ALTO,CA 94304

来源：

APPLIED PHYSICS LETTERS | 1982年 / 41卷 / 09期

关键词：

D O I：

10.1063/1.93708

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：824 / 826

页数：3

相关论文

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