Site control of metal droplet formation on CaF2 surface using a focused electron beam

被引：7

作者：

Kawasaki, K

Uejima, K

Tsutsui, K

机构：

[1] Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Midori-ku, Yokohama, 226

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 12B期

关键词：

site control; droplet formation; focused electron beam; surface modification; Ga; CaF2; nanofabrication;

D O I：

10.1143/JJAP.34.6846

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Site-controlled Ga droplet formation using modification of fluoride surface by electron beam exposure was investigated as a new nanofabrication technique. A single line of Ga droplets of approximately 10 nm diameter on CaF2 was obtained using a linearly scanned focused electron beam. The fluctuation of their position from the centerline was found to be about +/-20 mu, which was smaller than the estimated beam spot size. The mechanism of this site control effect was discussed using tire model of potential on the CaF2 surface for Ca atom adsorption.

引用

页码：6846 / 6852

页数：7

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