THE FILM FORMATION DYNAMICS IN SPIN COATING

被引：59

作者：

OHARA, T

MATSUMOTO, Y

OHASHI, H

机构：

来源：

PHYSICS OF FLUIDS A-FLUID DYNAMICS | 1989年 / 1卷 / 12期

关键词：

D O I：

10.1063/1.857520

中图分类号：

O3 [力学];

学科分类号：

08 ; 0801 ;

摘要：

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页码：1949 / 1959

页数：11

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