OPTICAL-ABSORPTION AND HYDROGEN CONTENT OF PLASMA-DEPOSITED CARBON-FILMS

被引：15

作者：

ELHOSSARY, FM

FABIAN, DJ

SOFIELD, CJ

机构：

[1] UNIV STRATHCLYDE,DEPT PHYS & APPL PHYS,GLASGOW G1 1XN,SCOTLAND

[2] AERE,HARWELL OX11 0RA,OXON,ENGLAND

来源：

THIN SOLID FILMS | 1988年 / 157卷 / 01期

关键词：

D O I：

10.1016/0040-6090(88)90342-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：29 / 34

页数：6

共 16 条

[1] RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS
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KOIDL, P
[J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) : 4590 - 4595
[2] STRUCTURE AND PHYSICAL-PROPERTIES OF PLASMA-GROWN AMORPHOUS HYDROGENATED CARBON-FILMS
COUDERC, P
CATHERINE, Y
[J]. THIN SOLID FILMS, 1987, 146 (01) : 93 - 107
[3] STRUCTURE, OPTICAL-PROPERTIES AND DECOMPOSITION KINETICS OF SPUTTERED HYDROGENATED CARBON
CRAIG, S
HARDING, GL
[J]. THIN SOLID FILMS, 1982, 97 (04) : 345 - 361
[4] ELHOSSARY FM, 1984, PLASMA PROCESSING SY, V30, P277
[5] OPTICAL-CONSTANTS OF RF SPUTTERED HYDROGENATED AMORPHOUS SI
FREEMAN, EC
PAUL, W
[J]. PHYSICAL REVIEW B, 1979, 20 (02): : 716 - 728
[6] GROWTH OF CARBON-FILMS WITH RANDOM ATOMIC-STRUCTURE FROM ION IMPACT DAMAGE IN A HYDROCARBON PLASMA
HOLLAND, L
OJHA, SM
[J]. THIN SOLID FILMS, 1979, 58 (01) : 107 - 116
[7] PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILMS AND THE EFFECTS OF DOPING
JONES, DI
STEWART, AD
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1982, 46 (05): : 423 - 434
[8] ELECTRICAL AND OPTICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILMS
MEYERSON, B
SMITH, FW
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 435 - 440
[9] THE DEVELOPMENT OF DIAMOND-LIKE (I-CARBON) THIN-FILMS AS ANTI-REFLECTING COATINGS FOR SILICON SOLAR-CELLS
MORAVEC, TJ
LEE, JC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 338 - 340
[10] Mott N. F., 1979, ELECT PROCESSES NONC

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