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CONTACT AND SHEET RESISTANCES OF SNO2 THIN-FILMS FROM TRANSMISSION-LINE MODEL MEASUREMENTS

被引：39
作者：
HOEFER, U
STEINER, K
WAGNER, E
机构：
[1] Fraunhofer-Institute für Physikalische Messtechnik, Freiburg in Breisgau, D-79110
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1995年 / 26卷 / 1-3期
关键词：
CONTACT RESISTANCES; SHEET RESISTANCES; THIN FILMS; TIN OXIDE; GAS SENSOR; TRANSMISSION-LINE MODEL;
D O I：
10.1016/0925-4005(94)01557-X
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Sheet and contact resistances of thin-film SnO2 gas sensors have been evaluated in different gas atmospheres using transmission-line model measurements. The modified sheet resistance close to the electrode/metal oxide interface exhibits the strongest response due to CO or NO2 gas reactions. The systematic variation of contact separations and SnO2 layer widths gives an idea for the design of simple and low-cost integrated sensor arrays. There is no necessity to modify each sensor of the array with different dopants or catalysts.
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页码：59 / 63
页数：5
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