ELLIPSOMETRIC INVESTIGATIONS OF BORON-RICH LAYERS ON SILICON

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 970 - &

[2] THE AVERAGE CONDUCTIVITY OF DIFFUSED LAYERS IN SEMICONDUCTORS [J]. SOLID-STATE ELECTRONICS, 1964, 7 (01) : 49 - +

[3] BUSEN KM, 1966, T METALL SOC AIME, V236, P306

[4] BUSEN KM, 1965, OCT PHIL M SOC

[5] SOME NEW FORMULAS FOR DETERMINING THE OPTICAL CONSTANTS FROM MEASUREMENTS ON REFLECTED LIGHT [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1955, 45 (09) : 743 - 748

[6] DUFFY MC, 1967, ELECTROCHEM TECHNOL, V5, P29

[7] GHEZZO M, 1967, M OPTICAL SOCIETY AM

[8] FORMATION AND COMPOSITION OF SURFACE LAYERS AND SOLUBILITY LIMITS OF PHOSPHORUS DURING DIFFUSION IN SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (12) : 1383 - 1381

[9] SCHMIDT PF, 1963, APR PITTSB M SOC

[10] TOLANSKI S, 1960, SURFACE MICROTOPOGRA

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 970 - &

[2] THE AVERAGE CONDUCTIVITY OF DIFFUSED LAYERS IN SEMICONDUCTORS [J]. SOLID-STATE ELECTRONICS, 1964, 7 (01) : 49 - +

[3] BUSEN KM, 1966, T METALL SOC AIME, V236, P306

[4] BUSEN KM, 1965, OCT PHIL M SOC

[5] SOME NEW FORMULAS FOR DETERMINING THE OPTICAL CONSTANTS FROM MEASUREMENTS ON REFLECTED LIGHT [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1955, 45 (09) : 743 - 748

[6] DUFFY MC, 1967, ELECTROCHEM TECHNOL, V5, P29

[7] GHEZZO M, 1967, M OPTICAL SOCIETY AM

[8] FORMATION AND COMPOSITION OF SURFACE LAYERS AND SOLUBILITY LIMITS OF PHOSPHORUS DURING DIFFUSION IN SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (12) : 1383 - 1381

[9] SCHMIDT PF, 1963, APR PITTSB M SOC

[10] TOLANSKI S, 1960, SURFACE MICROTOPOGRA