ULTRAVIOLET PHOTOETCHING OF COPPER

被引：27

作者：

BRANNON, JH ^{[1
]}

BRANNON, KW ^{[1
]}

机构：

[1] IBM CORP,PALO ALTO SCI CTR,PALO ALTO,CA 94304

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 05期

关键词：

D O I：

10.1116/1.584473

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1275 / 1283

页数：9

共 42 条

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