MICROSENSOR AND MICROACTUATOR APPLICATIONS OF THIN-FILMS

被引：7

作者：

HOWE, RT ^{[1
]}

机构：

[1] BERKELEY SENSOR & ACTUATOR CTR, ELECTR RES LAB, BERKELEY, CA 94720 USA

来源：

关键词：

D O I：

10.1016/0040-6090(89)90490-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：235 / 243

页数：9

共 34 条

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[3]

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[4]

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FAN, LS ;

TAI, YC ;

MULLER, RS .

[6]

FAN LS, 1989, IEEE MICRO ELECTRO M, P40

[7] FINE-GRAINED POLYSILICON FILMS WITH BUILT-IN TENSILE STRAIN [J].

GUCKEL, H ;

BURNS, DW ;

VISSER, CCG ;

TILMANS, HAC ;

DEROO, D .

[8]

Guckel H., 1986, International Electron Devices Meeting 1986. Technical Digest (Cat. No.86CH2381-2), P176

[9]

GUCKEL H, 1989, IEEE MICR EL MECH SY, P71

[10]

GUCKEL H, 1986, IEEE SOLID STATE SEN, P111