MICROSENSOR AND MICROACTUATOR APPLICATIONS OF THIN-FILMS

被引：7

作者：

HOWE, RT ^{[1
]}

机构：

[1] BERKELEY SENSOR & ACTUATOR CTR, ELECTR RES LAB, BERKELEY, CA 94720 USA

来源：

THIN SOLID FILMS | 1989年 / 181卷

关键词：

D O I：

10.1016/0040-6090(89)90490-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：235 / 243

页数：9

共 34 条

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