CHEMICAL RELAXATION MOLECULAR BEAM STUDIES OF REACTIVE GAS-SOLID SCATTERING .2. REACTION OF OZONE WITH HEATED GERMANIUM SURFACES

被引：36

作者：

MADIX, RJ

PARKS, R

SUSU, AA

SCHWARZ, JA

机构：

来源：

关键词：

D O I：

10.1016/0039-6028(71)90236-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：288 / &

共 18 条

[1] AXWORTHY AE, 1959, ADVANCES CHEMISTRY S
[2] A STUDY OF GASEOUS ETCHING OF GERMANIUM BY OXYGEN
BATKIN, NT
MADIX, RJ
[J]. SURFACE SCIENCE, 1967, 7 (02) : 109 - &
[3] BENSON SW, 1960, FOUNDATIONS CHEMICAL
[4] BENSON SW, 1968, THERMOCHEMICAL KINET, P70
[5] COOK GA, 1959, ADVANCES CHEMISTRY S
[6] Glasstone S, 1941, THEORY RATE PROCESSE
[7] THE VAPOR PRESSURES AND CRITICAL CONSTANTS OF PURE OZONE
JENKINS, AC
BIRDSALL, CM
[J]. JOURNAL OF CHEMICAL PHYSICS, 1952, 20 (07) : 1158 - 1161
[8] OBSERVATIONS OF CLEAN SURFACES OF SI GE AND GAAS BY LOW-ENERGY ELECTRON DIFFRACTION
JONA, F
[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1965, 9 (5-6) : 375 - &
[9] ORIENTATION-DEPENDENT STICKING COEFFICIENT IN GERMANIUM-OXYGEN SYSTEM
LEVER, RF
[J]. SURFACE SCIENCE, 1968, 9 (02) : 370 - &
[10] LEVER RF, 1969, STRUCTURE CHEMISTRY