A STUDY OF GASEOUS ETCHING OF GERMANIUM BY OXYGEN

被引：18

作者：

BATKIN, NT

MADIX, RJ

机构：

来源：

SURFACE SCIENCE | 1967年 / 7卷 / 02期

关键词：

D O I：

10.1016/0039-6028(67)90120-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：109 / &

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