DIRECT WRITING ONTO SI BY ELECTRON-BEAM STIMULATED ETCHING

被引：35

作者：

MATSUI, S

MORI, K

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 19期

关键词：

D O I：

10.1063/1.98614

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1498 / 1499

页数：2

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