MAGNETOSTRICTION MEASUREMENT BY INTERFEROMETRY

被引：15

作者：

BELLESIS, GH

HARLLEE, PS

RENEMA, A

LAMBETH, DN

机构：

[1] Carnegie Mellon Univ, Pittsburgh, PA

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1993年 / 29卷 / 06期

关键词：

D O I：

10.1109/20.281096

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A laser Doppler interferometric method using synchronous detection to measure the magnetostriction of soft magnetic films is described. The instrument has measured 2 angstrom magnetostrictive deflections of permalloy films on 500 mum silicon substrates. Saturation magnetostriction of 10(-9) can be measured for 1000 nm films on 100 mum Si substrates. The ultimate resolution of the interferometer is 0.1 angstrom as demonstrated using piezo-electrically-driven mirrors.

引用

收藏

页码：2989 / 2991

页数：3

相关论文

共 11 条

[1] MEASUREMENT OF THIN-FILMS MAGNETOSTRICTION WITH PIEZOELECTRIC CERAMIC SUBSTRATES [J].

ARAI, KI ;

YAMAGUCHI, M ;

MURANAKA, CS .

IEEE TRANSACTIONS ON MAGNETICS, 1989, 25 (05) :4201-4203

[2] CALCULATED ELASTIC-CONSTANTS FOR STRESS PROBLEMS ASSOCIATED WITH SEMICONDUCTOR DEVICES [J].

BRANTLEY, WA .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (01) :534-535

[3] MAGNETOSTRICTION MAPPING OF SOFT MAGNETIC-FILMS ON THICK RIGID SUBSTRATES [J].

GUDEMAN, CS .

IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) :2580-2582

[4]

JAGIELINSKI T, 1990, MRS BULL, V15, P38

[5] MEASUREMENT OF MAGNETOSTRICTION IN FERROMAGNETIC THIN-FILMS [J].

KLOKHOLM, E .

IEEE TRANSACTIONS ON MAGNETICS, 1976, 12 (06) :819-821

[6]

KLOKHOLM E, 1990, P S MAGNETIC MATERIA, P125

[7] MAGNETORESISTIVE MEASUREMENT OF MAGNETOSTRICTION IN PERMALLOY [J].

MARKHAM, D ;

SMITH, N .

IEEE TRANSACTIONS ON MAGNETICS, 1989, 25 (05) :4198-4200

[8] PATTERNING EFFECT ON EASY AXIS ALIGNMENT IN PERMALLOY THIN-FILM [J].

SHIROISHI, Y ;

SHIIKI, K ;

YUITOO, I ;

TANABE, H ;

FUJIWARA, H ;

KUDO, M .

IEEE TRANSACTIONS ON MAGNETICS, 1984, 20 (03) :485-488

[9] A NEW HIGH-PRECISION OPTICAL TECHNIQUE TO MEASURE MAGNETOSTRICTION OF A THIN MAGNETIC-FILM DEPOSITED ON A SUBSTRATE [J].

TAM, AC ;

SCHROEDER, H .

IEEE TRANSACTIONS ON MAGNETICS, 1989, 25 (03) :2629-2638

[10] MEASUREMENT OF MAGNETOSTRICTION OF AMORPHOUS DY-FE FILMS BY CANTILEVER CAPACITANCE METHOD [J].

YOSHINO, S ;

TAKAGI, H ;

TSUNASHIMA, S ;

MASUDA, M ;

UCHIYAMA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (10) :1527-1528