DEPOSITION OF INORGANIC SALTS FROM SOLUTION ON FLAT SUBSTRATES BY SPIN-COATING - THEORY, QUANTIFICATION AND APPLICATION TO MODEL CATALYSTS

被引：89

作者：

VANHARDEVELD, RM

GUNTER, PLJ

VANIJZENDOORN, LJ

WIELDRAAIJER, W

KUIPERS, EW

NIEMANTSVERDRIET, JW

机构：

[1] EINDHOVEN UNIV TECHNOL, SCHUIT INST CATAL, 5600 MB EINDHOVEN, NETHERLANDS

[2] EINDHOVEN UNIV TECHNOL, DEPT PHYS, 5600 MB EINDHOVEN, NETHERLANDS

[3] KONINKLIJKE SHELL EXPTL PROD LAB, 1031 CM AMSTERDAM, NETHERLANDS

来源：

APPLIED SURFACE SCIENCE | 1995年 / 84卷 / 04期

关键词：

D O I：

10.1016/0169-4332(95)00010-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The theory of spin-coating is applied to predict the amount of inorganic material that is deposited from a solution on a flat substrate on the basis of concentration, density, viscosity and evaporation rate of the solution and the spin speed applied during spin-coating. Measurements by Rutherford backscattering spectrometry (RBS) and inductively coupled plasma optical emission spectroscopy (ICP-OES) confirm the validity of the theory. Applications of the method in the preparation of model catalysts are discussed.

引用

页码：339 / 346

页数：8

共 25 条

[1] PREPARATION OF A RHODIUM CATALYST FROM RHODIUM TRICHLORIDE ON A FLAT, CONDUCTING ALUMINA SUPPORT STUDIED WITH STATIC SECONDARY ION MASS-SPECTROMETRY AND MONOCHROMATIC X-RAY PHOTOELECTRON-SPECTROSCOPY
BORG, HJ
VANDENOETELAAR, LCA
NIEMANTSVERDRIET, JW
[J]. CATALYSIS LETTERS, 1993, 17 (1-2) : 81 - 95
[2] SURFACE-CHEMISTRY OF CATALYST PREPARATION STUDIED BY USING FLAT ALUMINA MODEL SUPPORTS
BORG, HJ
VANDENOETELAAR, LCA
VANIJZENDOORN, LJ
NIEMANTSVERDRIET, JW
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04): : 2737 - 2741
[3] SPIN COATING - ONE-DIMENSIONAL MODEL
BORNSIDE, DE
MACOSKO, CW
SCRIVEN, LE
[J]. JOURNAL OF APPLIED PHYSICS, 1989, 66 (11) : 5185 - 5193
[4] INVESTIGATION OF THE SOLVENT-EVAPORATION EFFECT ON SPIN COATING OF THIN-FILMS
CHEN, BT
[J]. POLYMER ENGINEERING AND SCIENCE, 1983, 23 (07) : 399 - 403
[5] The flow due to a rotating disc.
Cochran, WG
[J]. PROCEEDINGS OF THE CAMBRIDGE PHILOSOPHICAL SOCIETY, 1934, 30 : 365 - 375
[6] AN INVESTIGATION OF THE THICKNESS VARIATION OF SPUN-ON THIN-FILMS COMMONLY ASSOCIATED WITH THE SEMICONDUCTOR INDUSTRY
DAUGHTON, WJ
GIVENS, FL
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (01) : 173 - 179
[7] SULFIDATION MECHANISM OF MOLYBDENUM CATALYSTS SUPPORTED ON A SIO2/SI(100) MODEL SUPPORT STUDIED BY SURFACE SPECTROSCOPY
DEJONG, AM
BORG, HJ
VANIJZENDOORN, LJ
SOUDANT, VGFM
DEBEER, VHJ
VANVEEN, JAR
NIEMANTSVERDRIET, JW
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1993, 97 (24) : 6477 - 6483
[8] EXPLORATION OF THE DEPOSITION OF SUBMICROMETER PARTICLES BY SPIN-COATING
DOORNKAMP, C
LASZLO, C
WIELDRAAIJER, W
KUIPERS, EW
[J]. JOURNAL OF MATERIALS RESEARCH, 1995, 10 (02) : 411 - 424
[9] FLOW OF A VISCOUS LIQUID ON A ROTATING DISK
EMSLIE, AG
BONNER, FT
PECK, LG
[J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (05) : 858 - 862
[10] PREPARATION OF ZRO2 ON FLAT, CONDUCTING SIO2/SI(100) MODEL SUPPORTS BY WET CHEMICAL TECHNIQUES - X-RAY PHOTOELECTRON-SPECTROSCOPY AND AUGER DEPTH PROFILING
ESHELMAN, LM
DEJONG, AM
NIEMANTSVERDRIET, JW
[J]. CATALYSIS LETTERS, 1991, 10 (3-4) : 201 - 209

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