REACTIVITY OF SOLID SILICON WITH HYDROGEN UNDER CONDITIONS OF A LOW-PRESSURE PLASMA

The reactivity of solid silicon with a dydrogen has been studied in a temperature range between about 10°C and ≈540°C at discharge currents up to ≈420 mA and a pressure of ≈0.13 mbar (0.1 torr). At a given current the reaction rate displays a pronounced maximum at a temperature T1 ≲ 60°C and it approaches zero at T2 ≲ 300°C; both T1 and T2 d pending on the discharge current. Consequently, chemical transport of silicon is possible in temperature as well as plasma gradients. © 1979.