DESIGN AND OPERATING CHARACTERISTICS OF LOW-PRESSURE PLASMA SYSTEMS

被引：11

作者：

HOLLAND, L

机构：

来源：

VACUUM | 1978年 / 28卷 / 10-1期

关键词：

D O I：

10.1016/S0042-207X(78)80018-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：437 / 445

页数：9

共 35 条

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[9] GAS DISCHARGE CLEANING OF VACUUM SURFACES [J].

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