SPUTTERING YIELDS OF NICKEL AND CHROMIUM

被引:8
作者
CHEN, GP
VONSEGGERN, J
GNASER, H
HOFER, WO
机构
[1] FORSCHUNGSZENTRUM JULICH, INST GRENZFLACHENFORSCH & VAKUUMPHYS, D-5170 JULICH 1, FED REP GER
[2] UNIV KAISERSLAUTERN, FACHBEREICH PHYS, D-6750 KAISERSLAUTERN, FED REP GER
[3] FORSCHUNGSZENTRUM JULICH, PROJEKT KERNFUS, D-5170 JULICH 1, FED REP GER
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 49卷 / 06期
关键词
D O I
10.1007/BF00616998
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:711 / 717
页数:7
相关论文
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