LASER FLUORESCENCE MEASUREMENTS OF THE FLUX-DENSITY OF TITANIUM SPUTTERED FROM AN OXYGEN COVERED SURFACE

被引：60

作者：

DULLNI, E ^{[1
]}

机构：

[1] RUHR UNIV BOCHUM,INST EXPTL PHYS 5,D-4630 BOCHUM,FED REP GER

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1985年 / 38卷 / 02期

关键词：

D O I：

10.1007/BF00620464

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：131 / 138

页数：8

共 32 条

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