IMPURITY ATOM DISTRIBUTION RESULTING FROM THERMAL REDISTRIBUTION OF AN IMPLANTED IMPURITY SOURCE

被引：3

作者：

PERLOFF, DS ^{[1
]}

机构：

[1] SIGNETICS CORP,RES & DEV LAB,SUNNYVALE,CA 94086

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1973年 / 120卷 / 08期

关键词：

D O I：

10.1149/1.2403647

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1135 / 1138

页数：4

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