LOW-TEMPERATURE GETTERING OF CU, AG, AND AU ACROSS A WAFER OF SI BY AL

被引：65

作者：

THOMPSON, RD

TU, KN

机构：

来源：

APPLIED PHYSICS LETTERS | 1982年 / 41卷 / 05期

关键词：

D O I：

10.1063/1.93565

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：440 / 442

页数：3

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