LASER-ASSISTED DEPOSITION OF IRON ON SI(111)-(7X7) - THE MECHANISM AND ENERGETICS OF FE(CO)5 DECOMPOSITION

被引：80

作者：

SWANSON, JR ^{[1
]}

FRIEND, CM ^{[1
]}

CHABAL, YJ ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

JOURNAL OF CHEMICAL PHYSICS | 1987年 / 87卷 / 08期

关键词：

D O I：

10.1063/1.452819

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：5028 / 5037

页数：10

共 27 条

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[J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1983, 105 (03) : 365 - 369
[10] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS
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[J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (11) : 1233 - 1243

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