SPUTTERING PATTERN DISTORTIONS ON PLANE AND CYLINDRICAL COLLECTORS DEPOSIT STRUCTURE OF ALUMINIUM PATTERN BETWEEN 100 AND 560 DEGREES K

被引：18

作者：

SCHULZ, F

SIZMANN, R

机构：

来源：

PHILOSOPHICAL MAGAZINE | 1968年 / 18卷 / 152期

关键词：

D O I：

10.1080/00318086.1968.11716230

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：269 / &

共 18 条

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