PLASMA-POLYMERIZED ELECTRON-BEAM RESISTS PREPARED FROM METHYL-METHACRYLATE USING VARIOUS CARRIER GASES

被引：10

作者：

GANGAL, SA ^{[1
]}

HORI, M ^{[1
]}

MORITA, S ^{[1
]}

HATTORI, S ^{[1
]}

机构：

[1] NAGOYA UNIV,DEPT ELECTR,CHIKUSA KU,NAGOYA,AICHI 464,JAPAN

来源：

THIN SOLID FILMS | 1987年 / 149卷 / 03期

关键词：

D O I：

10.1016/0040-6090(87)90397-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：341 / 350

页数：10

共 12 条

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[7] SOLVENT EFFECT ON NMR SPECTRA OF POLY(METHYL METHACRYLATE) [J].

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[8] PLASMA-INITIATED POLYMERIZATION OF METHYL-METHACRYLATE [J].

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[9]

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[10]

TAMANO J, 1981, PLASMA CHEM PLASMA P, V1, P261

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