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SI BRIDGING EPITAXY FROM SI WINDOWS ONTO SIO2 BY Q-SWITCHED RUBY-LASER PULSE ANNEALING
被引:67
作者
:
TAMURA, M
论文数:
0
引用数:
0
h-index:
0
TAMURA, M
TAMURA, H
论文数:
0
引用数:
0
h-index:
0
TAMURA, H
TOKUYAMA, T
论文数:
0
引用数:
0
h-index:
0
TOKUYAMA, T
机构
:
来源
:
JAPANESE JOURNAL OF APPLIED PHYSICS
|
1980年
/ 19卷
/ 01期
关键词
:
D O I
:
10.1143/JJAP.19.L23
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:L23 / L26
页数:4
相关论文
共 14 条
[1]
MELTING MODEL FOR PULSING-LASER ANNEALING OF IMPLANTED SEMICONDUCTORS
BAERI, P
论文数:
0
引用数:
0
h-index:
0
机构:
Istituto di Struttura della Materia dell'Universitá, I95129 Catania, Corso Italia
BAERI, P
CAMPISANO, SU
论文数:
0
引用数:
0
h-index:
0
机构:
Istituto di Struttura della Materia dell'Universitá, I95129 Catania, Corso Italia
CAMPISANO, SU
FOTI, G
论文数:
0
引用数:
0
h-index:
0
机构:
Istituto di Struttura della Materia dell'Universitá, I95129 Catania, Corso Italia
FOTI, G
RIMINI, E
论文数:
0
引用数:
0
h-index:
0
机构:
Istituto di Struttura della Materia dell'Universitá, I95129 Catania, Corso Italia
RIMINI, E
[J].
JOURNAL OF APPLIED PHYSICS,
1979,
50
(02)
: 788
-
797
[2]
EPITAXIAL LASER CRYSTALLIZATION OF THIN-FILM AMORPHOUS SILICON
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
BEAN, JC
LEAMY, HJ
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
LEAMY, HJ
POATE, JM
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
POATE, JM
ROZGONYI, GA
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
ROZGONYI, GA
SHENG, TT
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
SHENG, TT
WILLIAMS, JS
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WILLIAMS, JS
CELLER, GK
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
CELLER, GK
[J].
APPLIED PHYSICS LETTERS,
1978,
33
(03)
: 227
-
230
[3]
CW LASER ANNEAL OF POLYCRYSTALLINE SILICON - CRYSTALLINE-STRUCTURE, ELECTRICAL-PROPERTIES
GAT, A
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
GAT, A
GERZBERG, L
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
GERZBERG, L
GIBBONS, JF
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
GIBBONS, JF
MAGEE, TJ
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
MAGEE, TJ
PENG, J
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
PENG, J
HONG, JD
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
HONG, JD
[J].
APPLIED PHYSICS LETTERS,
1978,
33
(08)
: 775
-
778
[4]
CRYSTALLOGRAPHIC ORIENTATION OF SILICON ON AN AMORPHOUS SUBSTRATE USING AN ARTIFICIAL SURFACE-RELIEF GRATING AND LASER CRYSTALLIZATION
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
机构:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
GEIS, MW
FLANDERS, DC
论文数:
0
引用数:
0
h-index:
0
机构:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
FLANDERS, DC
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
SMITH, HI
[J].
APPLIED PHYSICS LETTERS,
1979,
35
(01)
: 71
-
74
[5]
CW LASER RECRYSTALLIZATION OF (100) SI ON AMORPHOUS SUBSTRATES
GIBBONS, JF
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
GIBBONS, JF
LEE, KF
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
LEE, KF
MAGEE, TJ
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
MAGEE, TJ
PENG, J
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
PENG, J
ORMOND, R
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ORMOND, R
[J].
APPLIED PHYSICS LETTERS,
1979,
34
(12)
: 831
-
833
[6]
HOLLOMON JH, 1953, PROGR METAL PHYSICS, P356
[7]
LAU SS, 1978, APPL PHYS LETT, V33, P235, DOI 10.1063/1.90310
[8]
EPITAXIAL-GROWTH OF DEPOSITED AMORPHOUS LAYER BY LASER ANNEALING
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,WASHINGTON,DC 20375
USN,RES LAB,WASHINGTON,DC 20375
LAU, SS
TSENG, WF
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,WASHINGTON,DC 20375
USN,RES LAB,WASHINGTON,DC 20375
TSENG, WF
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,WASHINGTON,DC 20375
USN,RES LAB,WASHINGTON,DC 20375
NICOLET, MA
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,WASHINGTON,DC 20375
USN,RES LAB,WASHINGTON,DC 20375
MAYER, JW
ECKARDT, RC
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,WASHINGTON,DC 20375
USN,RES LAB,WASHINGTON,DC 20375
ECKARDT, RC
WAGNER, RJ
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,WASHINGTON,DC 20375
USN,RES LAB,WASHINGTON,DC 20375
WAGNER, RJ
[J].
APPLIED PHYSICS LETTERS,
1978,
33
(02)
: 130
-
131
[9]
DEPTH OF MELTING PRODUCED BY PULSED-LASER IRRADIATION
NARAYAN, J
论文数:
0
引用数:
0
h-index:
0
机构:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge
NARAYAN, J
[J].
APPLIED PHYSICS LETTERS,
1979,
34
(05)
: 312
-
315
[10]
GROWTH OF DISLOCATIONS DURING LASER MELTING AND SOLIDIFICATION
NARAYAN, J
论文数:
0
引用数:
0
h-index:
0
机构:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge
NARAYAN, J
YOUNG, FW
论文数:
0
引用数:
0
h-index:
0
机构:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge
YOUNG, FW
[J].
APPLIED PHYSICS LETTERS,
1979,
35
(04)
: 330
-
332
←
1
2
→
共 14 条
[1]
MELTING MODEL FOR PULSING-LASER ANNEALING OF IMPLANTED SEMICONDUCTORS
BAERI, P
论文数:
0
引用数:
0
h-index:
0
机构:
Istituto di Struttura della Materia dell'Universitá, I95129 Catania, Corso Italia
BAERI, P
CAMPISANO, SU
论文数:
0
引用数:
0
h-index:
0
机构:
Istituto di Struttura della Materia dell'Universitá, I95129 Catania, Corso Italia
CAMPISANO, SU
FOTI, G
论文数:
0
引用数:
0
h-index:
0
机构:
Istituto di Struttura della Materia dell'Universitá, I95129 Catania, Corso Italia
FOTI, G
RIMINI, E
论文数:
0
引用数:
0
h-index:
0
机构:
Istituto di Struttura della Materia dell'Universitá, I95129 Catania, Corso Italia
RIMINI, E
[J].
JOURNAL OF APPLIED PHYSICS,
1979,
50
(02)
: 788
-
797
[2]
EPITAXIAL LASER CRYSTALLIZATION OF THIN-FILM AMORPHOUS SILICON
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
BEAN, JC
LEAMY, HJ
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
LEAMY, HJ
POATE, JM
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
POATE, JM
ROZGONYI, GA
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
ROZGONYI, GA
SHENG, TT
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
SHENG, TT
WILLIAMS, JS
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WILLIAMS, JS
CELLER, GK
论文数:
0
引用数:
0
h-index:
0
机构:
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540
CELLER, GK
[J].
APPLIED PHYSICS LETTERS,
1978,
33
(03)
: 227
-
230
[3]
CW LASER ANNEAL OF POLYCRYSTALLINE SILICON - CRYSTALLINE-STRUCTURE, ELECTRICAL-PROPERTIES
GAT, A
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
GAT, A
GERZBERG, L
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
GERZBERG, L
GIBBONS, JF
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
GIBBONS, JF
MAGEE, TJ
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
MAGEE, TJ
PENG, J
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
PENG, J
HONG, JD
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
HONG, JD
[J].
APPLIED PHYSICS LETTERS,
1978,
33
(08)
: 775
-
778
[4]
CRYSTALLOGRAPHIC ORIENTATION OF SILICON ON AN AMORPHOUS SUBSTRATE USING AN ARTIFICIAL SURFACE-RELIEF GRATING AND LASER CRYSTALLIZATION
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
机构:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
GEIS, MW
FLANDERS, DC
论文数:
0
引用数:
0
h-index:
0
机构:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
FLANDERS, DC
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
SMITH, HI
[J].
APPLIED PHYSICS LETTERS,
1979,
35
(01)
: 71
-
74
[5]
CW LASER RECRYSTALLIZATION OF (100) SI ON AMORPHOUS SUBSTRATES
GIBBONS, JF
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
GIBBONS, JF
LEE, KF
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
LEE, KF
MAGEE, TJ
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
MAGEE, TJ
PENG, J
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
PENG, J
ORMOND, R
论文数:
0
引用数:
0
h-index:
0
机构:
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ADV RES & APPLICAT CORP,SUNNYVALE,CA 94086
ORMOND, R
[J].
APPLIED PHYSICS LETTERS,
1979,
34
(12)
: 831
-
833
[6]
HOLLOMON JH, 1953, PROGR METAL PHYSICS, P356
[7]
LAU SS, 1978, APPL PHYS LETT, V33, P235, DOI 10.1063/1.90310
[8]
EPITAXIAL-GROWTH OF DEPOSITED AMORPHOUS LAYER BY LASER ANNEALING
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,WASHINGTON,DC 20375
USN,RES LAB,WASHINGTON,DC 20375
LAU, SS
TSENG, WF
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,WASHINGTON,DC 20375
USN,RES LAB,WASHINGTON,DC 20375
TSENG, WF
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,WASHINGTON,DC 20375
USN,RES LAB,WASHINGTON,DC 20375
NICOLET, MA
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,WASHINGTON,DC 20375
USN,RES LAB,WASHINGTON,DC 20375
MAYER, JW
ECKARDT, RC
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,WASHINGTON,DC 20375
USN,RES LAB,WASHINGTON,DC 20375
ECKARDT, RC
WAGNER, RJ
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,WASHINGTON,DC 20375
USN,RES LAB,WASHINGTON,DC 20375
WAGNER, RJ
[J].
APPLIED PHYSICS LETTERS,
1978,
33
(02)
: 130
-
131
[9]
DEPTH OF MELTING PRODUCED BY PULSED-LASER IRRADIATION
NARAYAN, J
论文数:
0
引用数:
0
h-index:
0
机构:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge
NARAYAN, J
[J].
APPLIED PHYSICS LETTERS,
1979,
34
(05)
: 312
-
315
[10]
GROWTH OF DISLOCATIONS DURING LASER MELTING AND SOLIDIFICATION
NARAYAN, J
论文数:
0
引用数:
0
h-index:
0
机构:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge
NARAYAN, J
YOUNG, FW
论文数:
0
引用数:
0
h-index:
0
机构:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge
YOUNG, FW
[J].
APPLIED PHYSICS LETTERS,
1979,
35
(04)
: 330
-
332
←
1
2
→