SI BRIDGING EPITAXY FROM SI WINDOWS ONTO SIO2 BY Q-SWITCHED RUBY-LASER PULSE ANNEALING

被引:67
作者
TAMURA, M
TAMURA, H
TOKUYAMA, T
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D O I
10.1143/JJAP.19.L23
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O59 [应用物理学];
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页码:L23 / L26
页数:4
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