POSTDEPOSITION ANNEALING EFFECTS IN RF REACTIVE MAGNETRON SPUTTERED INDIUM TIN OXIDE THIN-FILMS

被引：26

作者：

MARTINEZ, MA

HERRERO, J

GUTIERREZ, MT

机构：

[1] Instituto de Energías Renovables (CIEMAT), 28040 Madrid

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1992年 / 26卷 / 04期

关键词：

D O I：

10.1016/0927-0248(92)90050-Y

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Indium tin oxide films have been grown by RF reactive magnetron sputtering. The influence of the deposition parameters on the properties of the films has been investigated and optimized, obtaining a value for the figure of merit of 6700 (OMEGA-cm)-1. As-grown indium tin oxide films were annealed in vacuum and O2 atmosphere. After these heat treatments the electro-optical properties were improved, with values for the resistivity of 1.9 X 10(-4)-OMEGA-cm and the figure of merit of 26700 (OMEGA-cm)-1.

引用

页码：309 / 321

页数：13

共 37 条

[21] PREPARATION AND PROPERTIES OF REACTIVELY CO-SPUTTERED TRANSPARENT CONDUCTING FILMS
LEHMANN, HW
WIDMER, R
[J]. THIN SOLID FILMS, 1975, 27 (02) : 359 - 368
[22] INDIUM-DOPED ZINC-OXIDE FILMS AS TRANSPARENT ELECTRODES FOR SOLAR-CELLS
MAJOR, S
CHOPRA, KL
[J]. SOLAR ENERGY MATERIALS, 1988, 17 (05): : 319 - 327
[23] MANIFACIER JC, 1978, MATER RES B, V13, P109
[24] SPUTTERED CADMIUM OXIDE AND INDIUM OXIDE TIN OXIDE-FILMS AS TRANSPARENT ELECTRODES TO CADMIUM SULFIDE
MEHTA, RR
VOGEL, SF
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (06) : 752 - &
[25] ELECTRICAL AND OPTICAL-PROPERTIES OF IN2O3-SN FILMS PREPARED BY ACTIVATED REACTIVE EVAPORATION
NATH, P
BUNSHAH, RF
BASOL, BM
STAFFSUD, OM
[J]. THIN SOLID FILMS, 1980, 72 (03) : 463 - 468
[26] PREPARATION OF TRANSPARENT AND CONDUCTING INDIUM OXIDE-FILMS BY SOLUTION PYROLYSIS OF DIBUTYLINDIUM THIOLATE
NOMURA, R
MORITAKE, A
KANAYA, K
MATSUDA, H
[J]. THIN SOLID FILMS, 1988, 167 (1-2) : L27 - L29
[27] INDIUM-TIN-OXIDE-METAL INTERFACIAL RESISTANCE AND ITS IMPLICATION FOR SOLAR-CELLS
RASTOGI, AC
LAKSHMIKUMAR, ST
[J]. SOLAR CELLS, 1989, 26 (04): : 323 - 328
[28] THE PREPARATION OF THIN-FILMS BY PHYSICAL VAPOR-DEPOSITION METHODS
REICHELT, K
JIANG, X
[J]. THIN SOLID FILMS, 1990, 191 (01) : 91 - 126
[29] GROWTH AND CHARACTERIZATION OF TIN OXIDE-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION
SANON, G
RUP, R
MANSINGH, A
[J]. THIN SOLID FILMS, 1990, 190 (02) : 287 - 301
[30] PROPERTIES OF CONDUCTIVE ZINC-OXIDE FILMS FOR TRANSPARENT ELECTRODE APPLICATIONS PREPARED BY RF MAGNETRON SPUTTERING
SCHROPP, REI
MADAN, A
[J]. JOURNAL OF APPLIED PHYSICS, 1989, 66 (05) : 2027 - 2031

← 1 2 3 4 →