SODIUM PASSIVATION IN AL-SIO2-SI STRUCTURES CONTAINING CHLORINE

被引：22

作者：

STAGG, JP

BOUDRY, MR

机构：

[1] Philips Research Laboratories, Redhill, Surrey, RH1 5HA, United Kingdom

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 02期

关键词：

D O I：

10.1063/1.328772

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：885 / 899

页数：15

共 24 条

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