KINETIC-STUDY OF MONOSILANE PYROLYSIS FOR POLYCRYSTALLINE SILICON PRODUCTION IN A FLUIDIZED-BED

被引：11

作者：

KOJIMA, T ^{[1
]}

IWATA, K ^{[1
]}

FURUSAWA, T ^{[1
]}

机构：

[1] UNIV TOKYO,DEPT CHEM ENGN,TOKYO 113,JAPAN

来源：

JOURNAL OF CHEMICAL ENGINEERING OF JAPAN | 1989年 / 22卷 / 06期

关键词：

D O I：

10.1252/jcej.22.677

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：677 / 683

页数：7

共 12 条

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[2] The thermal decomposition of silane [J].

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Johnson, WC .

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[3] FINES IN FLUIDIZED-BED SILANE PYROLYSIS [J].

HSU, G ;

HOGLE, R ;

ROHATGI, N ;

MORRISON, A .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (03) :660-663

[4]

HSU G, 1986, P FLAT PLATE SOLAR A, P187

[5] HETEROGENEOUS DECOMPOSITION OF SILANE IN A FIXED-BED REACTOR [J].

IYA, SK ;

FLAGELLA, RN ;

DIPAOLO, FS .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (07) :1531-1535

[6]

IYA SK, 1986, P FLAT PLATE SOLAR A, P135

[7]

KOJIMA T, 1988, J CHEM ENG JAPAN

[8]

Kojima T., 1987, KAGAKU KOGAKU, VVol. 51, ppp. 217

[9] KINETICS OF SILANE AND SILYLENE DECOMPOSITIONS UNDER SHOCK-TUBE CONDITIONS [J].

NEWMAN, CG ;

RING, MA ;

ONEAL, HE .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1978, 100 (18) :5945-5946

[10]

NODA T, 1986, P FLAT PLATE SOLAR A, P213

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