NUCLEATION OF A NEW PHASE FROM THE INTERACTION OF 2 ADJACENT PHASES - SOME SILICIDES

被引：353

作者：

DHEURLE, FM

机构：

[1] IBM CORP,RES CTR,YORKTOWN HTS,NY 10598

[2] KUNGLIGA TEKNISKA HOGSKOLAN,INST MIKROVAGSTEKN,S-10044 STOCKHOLM,SWEDEN

来源：

关键词：

D O I：

10.1557/JMR.1988.0167

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：167 / 195

页数：29

共 132 条

[1] AARONSON HI, 1982, SOLID SOLID PHASE TR, P371
[2] ADDA Y, 1966, DIFFUSION SOLIDES, V1, P616
[3] NUCLEATION-CONTROLLED THIN-FILM INTERACTIONS - SOME SILICIDES
ANDERSON, R
BAGLIN, J
DEMPSEY, J
HAMMER, W
DHEURLE, F
PETERSSON, S
[J]. APPLIED PHYSICS LETTERS, 1979, 35 (03) : 285 - 287
[4] ANGELILLO J, 1980, J VAC SCI TECHNOL, V17, P471
[5] ANGILELLO J, 1980, THIN FILM INTERFACES, P369
[6] SOLID-STATE REACTIONS OF TA-W THIN-FILMS AND SI SINGLE-CRYSTALS
APPELBAUM, A
EIZENBERG, M
BRENER, R
[J]. VACUUM, 1983, 33 (04) : 227 - 230
[7] APPLEBAUM A, 1985, J APPL PHYS, V57, P1322
[8] THE FORMATION OF SILICIDES FROM THIN-FILMS OF SOME RARE-EARTH-METALS
BAGLIN, JE
HEURLE, FMD
PETERSSON, CS
[J]. APPLIED PHYSICS LETTERS, 1980, 36 (07) : 594 - 596
[9] DIFFUSION MARKER EXPERIMENTS WITH RARE-EARTH SILICIDES AND GERMANIDES - RELATIVE MOBILITIES OF THE 2 ATOM SPECIES
BAGLIN, JEE
DHEURLE, FM
PETERSSON, CS
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) : 2841 - 2846
[10] Baglin JEE, 1980, THIN FILM INTERFACES, P341