SOLID-STATE REACTIONS OF TA-W THIN-FILMS AND SI SINGLE-CRYSTALS

被引：22

作者：

APPELBAUM, A ^{[1
]}

EIZENBERG, M ^{[1
]}

BRENER, R ^{[1
]}

机构：

[1] TECHNION ISRAEL INST TECHNOL,INST SOLID STATE,IL-32000 HAIFA,ISRAEL

来源：

VACUUM | 1983年 / 33卷 / 04期

关键词：

D O I：

10.1016/0042-207X(83)90060-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：227 / 230

页数：4

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