Residual electrolyte as a factor influencing the electrical properties of porous silicon

被引:16
作者
Parkhutik, VP
机构
[1] Depto. de Termodin. Aplicada, Univ. Politécnica de Valencia, 46071 Valencia, Camino de Vera s/n
关键词
electrochemistry; electrical properties and measurements; silicon;
D O I
10.1016/0040-6090(95)08110-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The electrical properties of luminescent porous silicon layers (PS) were studied using a method of a.c. impedance spectroscopy in a range of electric field frequencies 0.175-10(5) Hz (amplitude 1 V) and temperatures -100 degrees C to +200 degrees C. It was found that the a.c. electrical conductivity of PS is very sensitive to its post-anodizing treatments. An electric equivalent circuit was designed to fit the experimental data acquired at differently treated PS samples. The components of the equivalent circuit were assigned to physical elements of PS (a surface phase on top of PS and a layer of underlying bulk material). Different post-growth treatments (training by a.c. electric field and temperature, pore filling by inert electrolyte, evacuation at increased temperatures) result in changing the electrical properties of the PS samples. This allows the conclusions to be made about the existence of residuals of the electrolyte inside the pores of freshly prepared PS and their influence onto its aging stability.
引用
收藏
页码:195 / 199
页数:5
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