Acoustic wave propagation in free standing CVD diamond: Influence of film quality and temperature

被引：8

作者：

Whitfield, MD

Audic, B

Flannery, CM

Kehoe, LP

Crean, GM

Jackman, RB

机构：

[1] UCL, London WC1E 7JE, England

[2] Univ Coll Cork, Natl Microelect Res Ctr, Cork, Ireland

来源：

关键词：

acoustic waves; CVD diamond; film quality; Young's modulus;

D O I：

10.1016/S0925-9635(98)00416-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Acoustic wave propagation in high quality, free standing polycrystalline CVD diamond wafers has been studied using a laser ultrasonic technique. The influence of wafer temperature in the range 30-250 degrees C on the propagation characteristics of Lamb waves has been assessed. Acoustic wave propagation characteristics showed little variation with temperature in the range measured suggesting that CVD diamond material of the type studied here may be suitable for the fabrication of acoustic wave devices operating at elevated temperatures. Material parameters extracted from the acoustic signal together with SEM studies strongly suggest that void, microcrack and grain boundary density rather than sp(2) content most influence the propagation of low frequency Lamb waves in free standing CVD diamond films. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：732 / 737

页数：6

共 24 条

[1] ESTIMATION OF THE THICKNESS OF THIN METAL SHEET USING LASER GENERATED ULTRASOUND [J].