MOVPE growth and optical properties of GaN deposited on c-plane sapphire

被引:10
作者
Briot, O [1 ]
Gil, B [1 ]
Tchounkeu, M [1 ]
Aulombard, RL [1 ]
Demangeot, F [1 ]
Frandon, J [1 ]
Renucci, M [1 ]
机构
[1] UNIV TOULOUSE 3,PHYS SOLIDES LAB,F-31062 TOULOUSE,FRANCE
关键词
GaN; growth; metalorganic vapor phase epitaxy (MOVPE); photoluminescence; Raman spectroscopy;
D O I
10.1007/s11664-997-0167-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We address combined utilization of temperature dependent reflectance, photoluminescence, and Raman spectroscopy measurements to optimize the structural and electronic properties of GaN epilayers deposited on sapphire. Last, we study residual strain fields in such epilayers.
引用
收藏
页码:294 / 300
页数:7
相关论文
共 24 条
  • [1] HETEROEPITAXIAL GROWTH AND THE EFFECT OF STRAIN ON THE LUMINESCENT PROPERTIES OF GAN FILMS ON (1120) AND (0001) SAPPHIRE SUBSTRATES
    AMANO, H
    HIRAMATSU, K
    AKASAKI, I
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (08): : L1384 - L1386
  • [2] OBSERVATION OF A NEGATIVE ELECTRON-AFFINITY FOR HETEROEPITAXIAL ALN ON ALPHA(6H)-SIC(0001)
    BENJAMIN, MC
    WANG, C
    DAVIS, RF
    NEMANICH, RJ
    [J]. APPLIED PHYSICS LETTERS, 1994, 64 (24) : 3288 - 3290
  • [3] Briot O, 1996, MATER RES SOC SYMP P, V395, P411
  • [4] Briot O, 1996, INST PHYS CONF SER, V142, P891
  • [5] BRIOT O, UNPUB
  • [6] BRIOT O, 1996, MATER RES SOC S P, V395, P396
  • [7] CALCULATION OF ENERGY-BAND PRESSURE COEFFICIENTS FROM DIELECTRIC THEORY OF CHEMICAL BOND
    CAMPHAUSEN, DL
    CONNELL, GAN
    PAUL, W
    [J]. PHYSICAL REVIEW LETTERS, 1971, 26 (04) : 184 - +
  • [8] k center dot p method for strained wurtzite semiconductors
    Chuang, SL
    Chang, CS
    [J]. PHYSICAL REVIEW B, 1996, 54 (04): : 2491 - 2504
  • [9] DEMANGEOT F, IN PRESS MAT SCI ENG
  • [10] ABSORPTION, REFLECTANCE, AND LUMINESCENCE OF GAN EXPITAXIAL LAYERS
    DINGLE, R
    SELL, DD
    STOKOWSKI, SE
    ILEGEMS, M
    [J]. PHYSICAL REVIEW B-SOLID STATE, 1971, 4 (04): : 1211 - +