Reproducible electrochemical etching of tungsten probe tips

被引:54
作者
Guise, OL [1 ]
Ahner, JW [1 ]
Jung, MC [1 ]
Goughnour, PC [1 ]
Yates, JT [1 ]
机构
[1] Univ Pittsburgh, Dept Chem, Ctr Surface Sci, Pittsburgh, PA 15260 USA
关键词
D O I
10.1021/nl010094q
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
An electrochemical procedure in KOH electrolyte has been developed to reproducibly produce similar to5 nm radius tungsten probe tips. It has been found that a spurious electrochemical etching process, driven by the natural potential difference between an Ir electrode and the W tip, causes rapid tip blunting at the end of the electrochemical etching period. By electrically reversing this potential difference within 500 ns following tip separation, the blunting process is eliminated yielding sharp tips with varying cone angles.
引用
收藏
页码:191 / 193
页数:3
相关论文
共 9 条
[1]  
[Anonymous], REV SCI INSTRUM
[2]   ELECTROCHEMICAL FABRICATION OF SCANNING-TUNNELING-MICROSCOPY TIPS WITHOUT AN ELECTRONIC SHUTOFF CONTROL [J].
BOURQUE, H ;
LEBLANC, RM .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (03) :2695-2697
[3]  
Chen C. J., 1993, INTRO SCANNING TUNNE
[4]  
Fomenko V.S., 1966, HDB THERMIONIC PROPE
[5]   An improved lamellae drop-off technique for sharp tip preparation in scanning tunneling microscopy [J].
Klein, M ;
Schwitzgebel, G .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1997, 68 (08) :3099-3103
[6]   PREPARATION OF STM W-TIPS AND CHARACTERIZATION BY FEM, TEM AND SEM [J].
MENDEZ, J ;
LUNA, M ;
BARO, AM .
SURFACE SCIENCE, 1992, 266 (1-3) :294-298
[7]  
Müller AD, 1999, REV SCI INSTRUM, V70, P3970, DOI 10.1063/1.1150022
[8]   A reproducible method to fabricate atomically sharp tips for scanning tunneling microscopy [J].
Nakamura, Y ;
Mera, Y ;
Maeda, K .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (08) :3373-3376
[9]   Electrochemical preparation of tungsten tips for a scanning tunneling microscope [J].
Oliva, AI ;
Romero, A ;
Pena, JL ;
Anguiano, E ;
Aguilar, M .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (05) :1917-1921