共 40 条
[13]
ON STRUCTURE AND PROPERTIES OF SPUTTERED TI AND AL BASED HARD COMPOUND FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (06)
:2695-2700
[15]
Nanoindentation hardness, abrasive wear, and microstructure of TiN/NbN polycrystalline nanostructured multilayer films grown by reactive magnetron sputtering
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1998, 16 (05)
:3104-3113
[17]
Structural stability of Si-O-a-C:H/Si-a-C:H layered systems
[J].
LAYERED MATERIALS FOR STRUCTURAL APPLICATIONS,
1996, 434
:113-118
[18]
MUNZ WD, 1986, J VAC SCI TECHNOL A, V4, P2717, DOI 10.1116/1.573713
[20]
Nesládek P, 2000, PHYS STATUS SOLIDI A, V177, P53, DOI 10.1002/(SICI)1521-396X(200001)177:1<53::AID-PSSA53>3.0.CO