In-plane photonic transduction of silicon-on-insulator microcantilevers

被引：35

作者：

Noh, Jong Wook ^{[1
]}

Anderson, Ryan ^{[1
]}

Kim, Seunghyun ^{[1
]}

Cardenas, Jaime

Nordin, Gregory P. ^{[1
]}

机构：

[1] Brigham Young Univ, Dept Elect & Comp Engn, Provo, UT 84602 USA

来源：

OPTICS EXPRESS | 2008年 / 16卷 / 16期

关键词：

D O I：

10.1364/OE.16.012114

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate an in-plane photonic transduction method for microcantilevers, which have been widely investigated for sensor applications. In our approach the microcantilever is etched to form a single mode rib waveguide. Light propagates down the microcantilever and crosses a small gap at the free end of the microcantilever, some of which is captured by an asymmetrical multimode waveguide that terminates in a Y-branch. The Y-branch outputs are used to form a differential signal that is monotonically dependent on microcantilever deflection. The measured differential signal matches simulation when microcantilever rotation is properly accounted for. The measured differential signal sensitivity is 1.4 x 10(-4) nm(-1) and the minimum detectable deflection is 0.35 nm. (C) 2008 Optical Society of America.

引用

页码：12114 / 12123

页数：10

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